29 8月 2023 gabriels
This paper reports a highly sensitive piezoelectric microelectromechanical systems (MEMS) resonant microphone array (RMA) for detection and classification of wheezing in lung sounds. The RMA is composed of eight width-stepped cantilever resonant microphones with Mel-distributed resonance frequencies from 230 to 630 Hz, the main frequency range of wheezing. At the resonance frequencies, the unamplified sensitivities of the microphones in the RMA are between 86 and 265 mV Pa−1, while the signal-to-noise ratios (SNRs) for 1 Pa sound pressure are between 86.6 and 98.0 dBA. Over 200–650 Hz, the unamplified sensitivities are between 35 and 265 mV Pa−1, while the SNRs are between 79 and 98 dBA. Wheezing feature in lung sounds recorded by the RMA is more distinguishable than that recorded by a reference microphone with traditional flat sensitivity, and thus, the automatic classification accuracy of wheezing is higher with the lung sounds recorded by the RMA than with those by the reference microphone, when tested with deep learning algorithms on computer or with simple machine learning algorithms on low-power wireless chip set for wearable applications.


MEMS piezoelectric resonant microphone array for lung sound classification

Hai Liu, Matin Barekatain, Akash Roy, Song Liu, Yunqi Cao, Yongkui Tang, Anton Shkel and Eun Sok Kim


  • Hai Liu,美国南加利福尼亚大学


Journal of Micromechanics and Microengineering

  • 2022年影响因子:2.3  Citescore:4.3
  • Journal of Micromechanics and Microengineering(JMM)是该领域的领军期刊,涵盖了微型机电结构、设备和系统,以及微观力学与微机电的各个方面。JMM专注于制造和集成技术方面的原创性研究,推广新的制造技术及设备。该期刊的研究范围包括微型工程和纳米工程学,涉及物理、化学、电子和生物等领域,也发表关于硅和非硅材料的制造和集成方面的最新研究。