
STMP特刊征稿|Defects Inspection
特刊详情 客座编辑 刘俭,哈尔滨工业大学 丁旭旻,哈尔滨工业大学 刘辰光,哈尔滨工业大学 主题范围 Surface and subsurface defects detection refers to the process of identifying and locating any imperfections, abnormalities, or discontinuities on the surface or within the subsurface layers of a material or object. Particularly in semiconductor manufacturing, it is crucial to ensure the quality and reliability of the fabricated devices....